CRYOPUMP

• Main Authors: OSAKO SHINJI, KIKUCHI TOSHIO
• Format: Patent
• Language: English
• Published: 07.03.1995
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; BLASTING; ELECTRICITY; HEATING; INDUCTANCES; LIGHTING; MAGNETS; MECHANICAL ENGINEERING; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES; TRANSFORMERS; WEAPONS

PURPOSE:To transmit no vibration to a vacuum device provided with a local analyzing function and a micro working function so as not to deteriorate a function of the vacuum device in a cryopump. CONSTITUTION:A cryopump is provided with plural discharging low temperature parts 2, 10, which are used for carrying out discharge by condensation or low temperature physical absorption of air, with different temperatures, and at least one low temperature part 2 between these low temperature parts is aerially separated from other parts (the other low temperature part and an ordinary temperature part) by means of magnetism generating means 6, 7 to be arranged in an isolated condition, so that heat conduction due to contact between the low temperature part and other parts is eliminated. A freezing driving part, 1 for cooling the low temperature part 2, which is aerially separately arranged, and a mechanism 12, which brings the freezing driving part 1 into contact with the low temperature part 2 when the low temperature 2 is cooled and separates the freezing driving part from the low temperature part 2 when cooling is finished, are arranged. On the other hand, an action of a vibration generating source provided in the freezing driving part 1 is stopped in the separation.