MEASURING METHOD FOR STRAIGHTNESS AND STRAIGHTNESS-MEASURING APPARATUS USING THE METHOD

PURPOSE:To highly accurately measure a straightness of a moving mechanism by splitting a luminous flux from a light source means to two luminous fluxes, inverting one of the two luminous fluxes in a vertical and a horizontal directions and synthesizing the luminous flux with the other luminous flux....

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Bibliographic Details
Main Author NEGISHI MASATO
Format Patent
LanguageEnglish
Published 22.12.1995
Edition6
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Summary:PURPOSE:To highly accurately measure a straightness of a moving mechanism by splitting a luminous flux from a light source means to two luminous fluxes, inverting one of the two luminous fluxes in a vertical and a horizontal directions and synthesizing the luminous flux with the other luminous flux. CONSTITUTION:A laser beam 6 from a lens 5 is guided to a beam splitter 7 as a light-splitting means and divided to two beams, namely, a transmitting beam 8 and a reflecting beam 9. The beam 8 of the divided beams is reflected at a reflecting mirror 11 and then at the splitter 7. The other beam 9 is reflected at a reflecting mirror 13 to pass through the splitter 7. The other beam 9 is thus superposed with the beam 8, resulting in a synthesized light beam 10. A four-dividing photodiode 24a as a means for detecting a position of a light point is fixed to a moving body 15 which is movable in a direction of one axis 16. The beam 10 is brought into the photodiode 24a. A straightness of the moving body 15 can be measured without being influenced by fluctuations of an optical beam 2 of a light source 1 when a position of the light beam 10 is measured by the means 24a.
Bibliography:Application Number: JP19940151660