OPTICAL MACHINING METHOD AND PRODUCTION OF PHOTOVOLTAIC POWER DEVICE

• Main Authors: KIYAMA SEIICHI, SHINOHARA WATARU, YAMAMOTO KEISHO
• Format: Patent
• Language: English
• Published: 28.11.1995
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; DEVICES USING STIMULATED EMISSION; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; SOLDERING OR UNSOLDERING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

PURPOSE:Not to generate abnormality in machined part, to simply execute machining of various pattern in a short time, also not to generate defect in producing an photovoltaic power device and to easily produce a high quality photovoltaic power device in machining a object to be machined by laser beam. CONSTITUTION:A laser beam is guided to the translucent part 5a of desired pattern formed on a mask 5, the laser beam having approximately uniform energy distribution passed the translucent part is image-formed/projected on an object to be machined by an image forming lens 6 and then the machining corresponding to the pattern of translucent part is executed on the object to be machined. By this method, an photoelectric converting element is machined, in particular, through the translucent part having one or more linear patterns formed on mask, groove machining is executed between one or more neighboring photoelectric converting element, the photovoltaic power device, in which plural photoelectric converting elements are electrically connected in series on the insulated surface of a substrate 11, is produced.