OPTICAL MACHINING EQUIPMENT

• Main Authors: GOTO JUNICHI, NAKATANI HAJIME, MINAGAWA TADAO, ZUMOTO NOBUYUKI
• Format: Patent
• Language: English
• Published: 14.11.1995
• Edition: 6
• Subjects: BASIC ELECTRIC ELEMENTS; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; DEVICES USING STIMULATED EMISSION; ELECTRICITY; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SOLDERING OR UNSOLDERING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

PURPOSE:To suppress adhesion of sputtered particle and reaction product by providing the protective material of specific material in the cylindrical body arranged with a combined lens of beam forming optical system and the cylindrical body arranged with a combined lens of image forming optical system. CONSTITUTION:When a scattered beam by a transmitting lens 41 and a reflecting beam on the surface of an object 10 to be machined are made incident an a protective material 43 made of synthetic quartz or optical glass, about 92% is passed the protective material 43, about the remaining 8% is reflected/ absorbed by the incidence surface of protective material 43. Also, a cylindrical body 42 is irradiated with the ultraviolet laser beam permeated through protective material 43 to be sputtered so as to generate a sputtered particle and its reaction product of metal or plastic, it is impeded by the protective material 43 so as not to be stuck or vapor deposited to the combined lens 41. By this method, contamination of the combined lens 41 is greatly suppressed.