GAS SUPPLYING APPARATUS

PURPOSE:To easily remove or attach a flow control valve with a mass flowmeter by providing coupling means for attaching the valve to input and output blocks by an operation from above. CONSTITUTION:Heat of a tapelike heater 51 is transmitted to a solenoid valve 53 with a mass flowmeter via a heat tr...

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Bibliographic Details
Main Authors NITTA SHINICHI, BANDOU HIROSHI, KOKETSU MASAYUKI
Format Patent
LanguageEnglish
Published 31.10.1995
Edition6
Subjects
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Summary:PURPOSE:To easily remove or attach a flow control valve with a mass flowmeter by providing coupling means for attaching the valve to input and output blocks by an operation from above. CONSTITUTION:Heat of a tapelike heater 51 is transmitted to a solenoid valve 53 with a mass flowmeter via a heat transfer block to be brought into close contact by a pressing spring 2 provided under the valve 53. Heat of the heater 51 is transferred to an input block 10 and an output block 11 via a sub-heat transfer block 3 attached to the blocks 10, 11. The blocks 1, 3 are held at holding grooves 6, 7 opened above, and the valve 53 is mounted via mounting blocks 24, 25 attached or detached only by an operation from above. Thus, a gas passage in a gas supplying apparatus can be uniformly heated to be heat insulated at a predetermined temperature or higher, and gas which is easily liquefied can be effectively supplied in a necessary quantity without liquefying it.
Bibliography:Application Number: JP19940104779