MOLECULAR BEAM SOURCE CELL AND METHOD FOR GROWING CRYSTAL BY MOLECULAR BEAM

• Main Author: YAMAMOTO TATSU
• Format: Patent
• Language: English
• Published: 25.07.1995
• Edition: 6
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; BASIC ELECTRIC ELEMENTS; CHEMISTRY; CRYSTAL GROWTH; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; METALLURGY; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SEMICONDUCTOR DEVICES; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

PURPOSE:To provide a molecular beam source cell which is improved in yield by stopping crystal growth when a material to be evaporated in a housing section runs out and is conditioned to generate a fluctuation in the molecular beam by recognizing the amt. of the material to be evaporated in the housing section during the growth of the MBE crystal. CONSTITUTION:This molecular beam source cell is designed to control the electric power to be supplied to a heater 3 until the temp. of a vessel 1 for the material to be evaporated in which the material 2 to be evaporated is housed is kept constant by detecting the temp. of the vessel 1 for the material to be evaporated by a temp. detecting element 5 at the time of heating the vessel 1 of the material to be evaporated by a heating element 3, such as electric resistor, and a reflector 4. Supporting means 61, 62 of the vessel 1 for the material to be evaporated are provided with a weight detecting means 7 for detecting a change in the weight of the vessel 1 of the material to be evaporated generated by consumption of the material 2 to be evaporated. The signal which is generated from this weight detecting means 7 and is led to the outer side of the vacuum flange 9 by a signal output line 8 is monitored and the crystal growth is stopped when the material to be evaporated runs out and attains the state of generating the fluctuation in the molecular beam quaniits.