SPUTTERING DEVICE HAVING COLLIMATOR
PURPOSE:To deal with a change in an aspect ratio occurring in adhesion of sputtered particles in apertures during film formation by forming a collimator to a structure in which two pieces of members fit freely vertically movably to each other and varying the length of the apertures. CONSTITUTION:The...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
13.06.1995
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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