VOLTAGE MEASURING DEVICE

PURPOSE:To accurately detect voltage changes at a localized part of a subject for measurement. CONSTITUTION:A pair of mirrors 55, 57 for resonance are disposed to sandwich a laser medium 51 and an E-O probe 53 made in pairs. Linearly polarized light is emitted from the laser medium 51. The linearly...

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Bibliographic Details
Main Authors URAGAMI TSUNEYUKI, HIRANO ISUKE, TAKAHASHI HIRONORI, AOSHIMA SHINICHIRO
Format Patent
LanguageEnglish
Published 22.03.1994
Edition5
Subjects
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Summary:PURPOSE:To accurately detect voltage changes at a localized part of a subject for measurement. CONSTITUTION:A pair of mirrors 55, 57 for resonance are disposed to sandwich a laser medium 51 and an E-O probe 53 made in pairs. Linearly polarized light is emitted from the laser medium 51. The linearly polarized light is caused to impinge on the E-O probe 53, reflected at the mirror 57 and returned. When a voltage from a subject for measurement is being applied to the E-0 probe 53, the reflectance of the E-O probe 53 is varied in accordance with the voltage and then light emitted from the E-O probe 53 is converted into elliptically polarized light so that the resonating state of a laser resonator is changed. Therefore, the intensity of output light emitted from the partially transmitting mirror 57 to the outside of the laser resonator corresponds to the voltage applied to the subject for measurement near which the E-O probe 53 is located. The voltage distribution of the subject for measurement having a fine structure, such as IC, can thus be detected two-dimensionally.
Bibliography:Application Number: JP19920231822