LASER MICROSCOPE

PURPOSE:To obtain a laser microscope whose manufacturing cost is reduced and by which stable measurement can be executed over a long period. CONSTITUTION:This is the laser microscope which irradiates an object to be measured with a laser beam and facilitates the observation of the surface shape ther...

Full description

Saved in:
Bibliographic Details
Main Authors INOUE SUSUMU, MOBARA MASAICHI, OZAWA KAZUMASA
Format Patent
LanguageEnglish
Published 18.03.1994
Edition5
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
Online AccessGet full text

Cover

More Information
Summary:PURPOSE:To obtain a laser microscope whose manufacturing cost is reduced and by which stable measurement can be executed over a long period. CONSTITUTION:This is the laser microscope which irradiates an object to be measured with a laser beam and facilitates the observation of the surface shape thereof based on the reflected light beam. Besides, this microscope is provided with a laser diode 21 emitting the laser slit light beam LS unidirectionally extended while making the shape of the laser beam emitting surface identical or almost identical to the aspect ratio of the light receiving surface of a one- dimensional CCD image sensor 17 and the one-dimensional CCD image sensor 17 receiving the reflected light beam RLS of the unidirectionally extended light beam LS on the object to be measured R. As the result, the laser beam can be stably converged to a slit state and the manufacturing cost can be reduced.
Bibliography:Application Number: JP19920228295