POSITIONING DEVICE

PURPOSE:To provide a positioning device capable of positioning a movable table for a target position at high speed and with high accuracy. CONSTITUTION:This positioning device is provided with first linear motor (first control means) 4 positioning a movable table 1 provided on a holding table 3 so a...

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Bibliographic Details
Main Authors SUEMATSU MUTSUMI, OTANI KAZUMI
Format Patent
LanguageEnglish
Published 04.03.1994
Edition5
Subjects
BASIC ELECTRIC ELEMENTS
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT
CONTROLLING
DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MACHINE TOOLS
MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
METAL-WORKING NOT OTHERWISE PROVIDED FOR
PERFORMING OPERATIONS
PHYSICS
PRINTED CIRCUITS
REGULATING
SEMICONDUCTOR DEVICES
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
TRANSPORTING
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Summary:PURPOSE:To provide a positioning device capable of positioning a movable table for a target position at high speed and with high accuracy. CONSTITUTION:This positioning device is provided with first linear motor (first control means) 4 positioning a movable table 1 provided on a holding table 3 so as to slide freely to a target position P by a feedback control and with a second linear motor (second control means) 10 adding thrust which has the size proportional to the deviation amount of the position of the movable table 1 and the target position P and is in the direction orienting the target position to this movable table 1.
Bibliography:Application Number: JP19920211638