TEMPERATURE SENSOR

PURPOSE:To facilitate automatic production of a thermistor being highly sensitive and excellent in linearity and having stable characteristics, with an excellent yield, by using a material which is easy to obtain. CONSTITUTION:A header 2 is constructed by making a groove 5 in the radial direction in...

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Bibliographic Details
Main Authors HIRABAYASHI YASUO, KARASAWA SHIRO, SATO HIDEOMI, HIDAKA NAOMI
Format Patent
LanguageEnglish
Published 25.02.1994
Edition5
Subjects
MEASURING
MEASURING QUANTITY OF HEAT
MEASURING TEMPERATURE
PHYSICS
TESTING
THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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Summary:PURPOSE:To facilitate automatic production of a thermistor being highly sensitive and excellent in linearity and having stable characteristics, with an excellent yield, by using a material which is easy to obtain. CONSTITUTION:A header 2 is constructed by making a groove 5 in the radial direction in the upper surface and by fixing electrode pins 3 symmetrically on the opposite sides of the groove 5. A temperature sensor chip 6 is put and fixed in the groove 5, terminals 8 of a temperature-sensitive part 7 of the temperature sensor chip 6 and the electrode pins 3 are connected together by bonding wires 9 and an insulator paler 10 is formed. The temperature sensor chip 6 is constructed by implanting baron ions in a astip-shaped part on a rectangular silicon wafer, by conducting treatment for insulation and by providing electrodes 8.
Bibliography:Application Number: JP19920098814