INTERATOMIC FORCE MICROSCOPE

PURPOSE:To obtain an interatomic force microscope wherein the influence of a frictional force generated between a probe for a cantilever and a sample is eliminated and the shape of a surface is measured stably and with good accuracy. CONSTITUTION:When a probe 12 for a cantilever 6 is moved in the X-...

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Bibliographic Details
Main Authors KADO HIROYUKI, TODA TAKAO
Format Patent
LanguageEnglish
Published 18.02.1994
Edition5
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TECHNICAL SUBJECTS COVERED BY FORMER USPC
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS
TESTING
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Summary:PURPOSE:To obtain an interatomic force microscope wherein the influence of a frictional force generated between a probe for a cantilever and a sample is eliminated and the shape of a surface is measured stably and with good accuracy. CONSTITUTION:When a probe 12 for a cantilever 6 is moved in the X-direction, the probe 12 is separated from a sample 5 by using a Z-direction piezoelectric body 3, the probe is brought into contact with the sample again after the probe has been moved, and the displacement amount of the cantilever 6 is detected.
Bibliography:Application Number: JP19920198593