GAS ANALYZER
PURPOSE:To analyze the amount of impurities in two or more kinds of gases and/or liquefied gaes with high accuracy in such a way that the gases are not contaminated with other gases and that other gases do hot return to a product-gas supply source. CONSTITUTION:A gas analytical apparatus is provided...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
28.10.1994
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Edition | 5 |
Subjects | |
Online Access | Get full text |
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Summary: | PURPOSE:To analyze the amount of impurities in two or more kinds of gases and/or liquefied gaes with high accuracy in such a way that the gases are not contaminated with other gases and that other gases do hot return to a product-gas supply source. CONSTITUTION:A gas analytical apparatus is provided sequentially with two or more product-gas pipe passages 1a to 1d, with a collection pipe 5 at the downstream of a sampling pipe passage 1e so as to be parallel to them, with a supply pipe passage equipped with a pressure regulator 7, with a distributor 5' equipped with purge valves 10a, 10b, with two or more analytical-gas pipe passages 9a to 9d equipped with solenoid valves 11a to 11d and with two or more kinds of analyzers 8a to 8d. Stop valves 2a to 2d, check valves 12a to 12d, two kinds of three-way valves 13a to 13d, 14a to 14d and fine gas purge means 16a to 16d are installed respectively at the individual product-gas pipe passages 1a to 1d, and a stop valve 2e, two three-way valves 13e, 14e and a fine gas purge means 16e are installed from the upstream side. |
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Bibliography: | Application Number: JP19930087246 |