MANUFACTURE OF LIQUID CRYSTAL DISPLAY DEVICE

• Main Author: YANA AKIHIDE
• Format: Patent
• Language: English
• Published: 21.10.1994
• Edition: 5
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

PURPOSE: To avoid the current effect of a transparent electrode and reduce the contact resistance of a source/drain by depositing a heavily doped semicon ductor layer and metal on the entire surface and selectively etching to form data lines and source electrodes connected to source regions. CONSTITUTION: After continuously depositing a heavily doped n-type polycrystalline Si 11 and metal 12 such as Al, a photosensitive film 13 is coated thereon, exposed and developed. When this film 13 is developed, the electrolyte of the developer liq. will lower along the Al bank but never contacts a transparent electrode 9 as the Si 11 acts as a barriers, thus preventing the current effect. The heavily doped n-type polycrystalline Si 11 directly contacts drain/ source regions 6a, 6b to facilitate the contact resistance control. The Si 11 and metal layer 12 are laminated to form a double structure which prevents the short-circuit.