INSPECTION METHOD FOR ELECTRODE PLATE

• Main Authors: YANAGII KEIKICHI, SUGAWARA KENTARO, HARUTA YUICHI
• Format: Patent
• Language: English
• Published: 16.09.1994
• Edition: 5
• Subjects: CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; PRINTED CIRCUITS; TESTING

PURPOSE:To roughly align inspection and electrode plates to be inspected, for detecting electrical connection state of each electrode pair, and re-detecting connection state by rotating specified angles around the axis vertical to both plates, and to calculate deviation between both plates with mathematical means based on the coordinate position of rotation axis reference of each electrode pair, direction and angle of rotation and detection content of two-time trial. CONSTITUTION:An alignment mark on a circuit board on a transportation table 15 is monitored by a camera 17, for rough positioning against an electrode to be inspected. By using a pressurizing mechanism 29, a lower part unit 22 is moved upward, and the substrate is sandwitched, while being pressed, with an upper part unit 21, so that electric connection for each electrode pair is stored in a control computer 12. Then the substrate and electrode are relatively rotated, so that the second time connection inspection is performed. The position of a rotation axis at that time, direction of rotation, angle and inspection content are stored in a position control computer 13. Based on these stored contents, through mathematical/analytical processing, the deviation between both calculated, for fine alignment, thus, displacement problem is solved.