METHOD AND APPARATUS FOR HEAT TREATMENT OF MATERIAL HAVING PYROELECTRIC PROPERTY

PURPOSE:To provide the heat treatment apparatus for a material having a pyroelectric property capable of suppressing the generation of surface charges by a pyroelectric effect, etc., while executing a heat treatment at a high temp. CONSTITUTION:A substrate 4 consisting of the pyroelectric material c...

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Bibliographic Details
Main Authors ICHIKAWA TOMONORI, YASUMA YASUHIRO
Format Patent
LanguageEnglish
Published 09.09.1994
Edition5
Subjects
AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE
APPARATUS SPECIALLY ADAPTED THEREFOR
APPARATUS THEREFOR
CHEMISTRY
CINEMATOGRAPHY
CRYSTAL GROWTH
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
METALLURGY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE
REFINING BY ZONE-MELTING OF MATERIAL
SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE
SINGLE-CRYSTAL-GROWTH
UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Summary:PURPOSE:To provide the heat treatment apparatus for a material having a pyroelectric property capable of suppressing the generation of surface charges by a pyroelectric effect, etc., while executing a heat treatment at a high temp. CONSTITUTION:A substrate 4 consisting of the pyroelectric material coated with a photoresist 3 on its surface can be arranged on a spacer 2 arranged in the bottom within a casing 1 which can be hermetically closed. An ion irradiation device 5 is arranged at the upper prescribed position within this casing. This ion irradiation device 5 is equipped with positive and negative discharge electrodes 5b in the blast direction of a fan 5a, generates a corona discharge by impression of a prescribed high voltage between these electrodes and ionizes the gases (air, N2, etc.) existing between the electrodes. The ionized gases 6 are injected downward by the blast power from the fan and are passed within an aluminum electrode 5c, thereafter, made to blow against the substrate or the like consisting of the pyroelectric material. The charges are neutralized by these ionized gases even if the charges are prone to be generated by the pyroelectric effect following the temp. change.
Bibliography:Application Number: JP19930057976