ACCELERATION SENSOR AND ITS MANUFACTURE

PURPOSE:To provide a small and light acceleration sensor, which escapes from damage in a beam part, which supports a movable electrode, during assembly and can be machined easily. CONSTITUTION:Fixed electrodes 16, 17 are formed on both of the front and the back faces of a base wafer 25, which is tre...

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Bibliographic Details
Main Authors NEGORO YASUHIRO, HARA TETSUZO
Format Patent
LanguageEnglish
Published 02.09.1994
Edition5
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:PURPOSE:To provide a small and light acceleration sensor, which escapes from damage in a beam part, which supports a movable electrode, during assembly and can be machined easily. CONSTITUTION:Fixed electrodes 16, 17 are formed on both of the front and the back faces of a base wafer 25, which is treated by anisotropic etching for a short time after patterning, so that the first semifinished product 35 is formed. Movable electrodes 21, 22 are arranged in an opposed position to the fixed electrodes 16, 17 of the base wafer 25 in one side face of the movable side wafers 26A, 26B and are patterned, so that the second semifinished product 36 is formed. After the second semifinished product 36 is arranged on the first semifinished product 35 like a sandwich to be integrated together, anisotropic etching is carried out on this, so that pedestal parts 19A, 19B are formed on both sides of the center fixing part 18 via a space part in the fixing side base wafer 25, the space part is formed around them, and mass parts 30A, 30B and a beam are formed in the movable side wafers 26A, 26B, and consequently, an acceleration sensor is manufactured.
Bibliography:Application Number: JP19930051533