WAFER PROBER

PURPOSE:To provide uniform needle pressure, by adjusting a probe card from the chuck-top side so that the probe card is put in parallel with a wafer, and detect an inclination of the probe card in a non-contact way. CONSTITUTION:A piezo-electric element 43 is inserted in a chuck top, and an upper st...

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Bibliographic Details
Main Authors YAMAWAKI MASAO, KAWAI MAKOTO
Format Patent
LanguageEnglish
Published 28.01.1994
Edition5
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE:To provide uniform needle pressure, by adjusting a probe card from the chuck-top side so that the probe card is put in parallel with a wafer, and detect an inclination of the probe card in a non-contact way. CONSTITUTION:A piezo-electric element 43 is inserted in a chuck top, and an upper stage 42 in the chuck top can be moved slantwise. A DUT board including a probe card is also made movable slantwise using the piezo-electric element 43. Moreover, an inclination of the probe card is detected in a non- contact way by casting a laser beam to the probe card.
Bibliography:Application Number: JP19920199136