PROJECTION EXPOSURE METHOD

PURPOSE:To improve throughput, and to enhance the accuracy of alignment by a method wherein the positions of at least three original-image patterns in first original-image patterns transferred are detected, the positions of the array of the first original-image patterns are obtained on the basis of...

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Bibliographic Details
Main Authors TSUYUKI HISAMASA, SUGIYAMA HIDEJI
Format Patent
LanguageEnglish
Published 28.01.1994
Edition5
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:PURPOSE:To improve throughput, and to enhance the accuracy of alignment by a method wherein the positions of at least three original-image patterns in first original-image patterns transferred are detected, the positions of the array of the first original-image patterns are obtained on the basis of the results of the detection and second original-image patters are superposed and transferred at the obtained positions. CONSTITUTION:The data of (xc, yc), (xo, yo) and (xd, yd) are input to an X waviness-error correction computing circuit 16, and an X waviness error is obtained. A Y pitch error is acquired similarly by a Y pitch-error correction computing circuit 17. The data of (xa, ya), (xo, yo) and (xb, yb) are input to a Y waviness-error correction computing circuit 18, and a Y waviness error is obtained. An X pitch error is acquired similarly by an X pitch-error correction computing circuit 19. The data of (xd, yd), (xc, yc), (xa, ya) and (xb, y) are input to a straightness-error correction computing circuit 20, and a straightness error is acquired. The final target position of a stage is obtained by the result of computation acquired by these computing circuits.
Bibliography:Application Number: JP19920249109