CHARGED PARTICLE ENERGY ANALYZER

PURPOSE:To provide a charged particle energy analyzer enabling analysis of a very small part and high sensitivity analysis by guiding charged particles to the charged particle energy analyzer without using a deflector for deflection. CONSTITUTION:A charged particle energy analyzer is provided, in wh...

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Bibliographic Details
Main Author MITAMURA SHIGEHIRO
Format Patent
LanguageEnglish
Published 28.01.1994
Edition5
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:PURPOSE:To provide a charged particle energy analyzer enabling analysis of a very small part and high sensitivity analysis by guiding charged particles to the charged particle energy analyzer without using a deflector for deflection. CONSTITUTION:A charged particle energy analyzer is provided, in which a band-pass filter comprises a low pass filter 10 and a high pass filter 20. A hole 41 for letting charged particles pass is provided on the side of the high pass filter 20, while an electric field type lens 42 for focusing charged particles is provided on the hole 41 for letting charged particles pass, and the charged particles can thus be guided into the energy analyzer without using a deflector for deflection.
Bibliography:Application Number: JP19920172939