SURFACE CONDITION INSPECTING EQUIPMENT

• Main Authors: UMEDA HIROKATSU, MOGI SHIGEO, HIRONAKA KAZUO, MAKIMAE TATSUMI, IKEDA HIROSHI, SASANISHI KAZUTO, FUJII YUTAKA
• Format: Patent
• Language: English
• Published: 25.01.1994
• Edition: 5
• Subjects: CHAMBERS PROVIDED WITH MANIPULATION DEVICES; HAND TOOLS; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MANIPULATORS; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PERFORMING OPERATIONS; PHYSICS; PORTABLE POWER-DRIVEN TOOLS; TESTING; TRANSPORTING

PURPOSE:To make it possible to carry out the sure inspection by detecting the luminous intensity gradient at an end in scanning direction of an image processing region and then controlling the luminous intensity gradient over the entire region thereby preventing an uninspected part from occurring due to the profile of the surface to be inspected. CONSTITUTION:An illuminating section 1 is connected with a voltage regulation controller 4 for controlling voltage supply to each lamp 2 so that the irradiation amount of each lamp 2 varies continuously to achieve a predetermined constant luminous intensity gradient. Irradiation light amount is maximized at the flange 1B side end of the illuminating section 1 whereas it is minimized at the flange 1C side end thus obtaining irradiation light amount having the predetermined constant gradient over the entire width between the flanges 1B, 1C. When a surface to be inspected is irradiated with light through a diffuser 3 having uniform transmittance, luminous intensity varying at a constant gradient is achieved. Irradiation light amount having gentle gradient where the difference between maximum and minimum values is suppressed, or totally suppressed irradiation light having constant gradient can be obtained by regulating irradiation light amount of each lamp 2.