RESIST REMOVING METHOD

PURPOSE:To provide the resist removing method capable of completely releasing and removing the resist variously denatured during the formation step of semiconductor chip, causing no damage to an underneath film, etc., and leaving no residue at all. CONSTITUTION:Resist 14 is removed by ashing step by...

Full description

Saved in:
Bibliographic Details
Main Author KASE MASA
Format Patent
LanguageEnglish
Published 14.06.1994
Edition5
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

Be the first to leave a comment!
You must be logged in first