MASS FLOW CONTROLLER

PURPOSE:To facilitate package and to improve reliability by mutually communicating required information between a device main body and an instrument part without interposing any exclusive communication cable. CONSTITUTION:In order to set the fluid flow rate of a main body 20 of the device, a flow ra...

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Bibliographic Details
Main Author SHIMOMURA MITSUZO
Format Patent
LanguageEnglish
Published 22.04.1994
Edition5
Subjects
CONTROLLING
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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Summary:PURPOSE:To facilitate package and to improve reliability by mutually communicating required information between a device main body and an instrument part without interposing any exclusive communication cable. CONSTITUTION:In order to set the fluid flow rate of a main body 20 of the device, a flow rate set value is inputted by an input setter 17 and modulated by a modulation circuit 50 and afterwards, a radio wave is transmitted through an antenna 51. This radio wave is inputted through an antenna 30 of the device main body 20 to a reception circuit 26, demodulated by a demodulation circuit 27, fetched into a valve control part 7 later, D/A-converted and turned to a flow rate setting signal (b). On the other hand, information to be detected in the main body 20, for example, a flow rate detecting signal (a) obtained in the valve control part 7, is sent to a modulation circuit 25 and modulated and afterwards, a radio wave is oscillated through the antenna 30. This radio wave is inputted through the antenna 51 of the instrument part 40 to a reception circuit 41. Afterwards, this radio wave is inputted through the antenna 51 of the instrument part 40 to the reception circuit 41 and demodulated by a demodulation circuit 42, and a detected flow rate value is displayed on an instrument 18 after the D/A conversion.
Bibliography:Application Number: JP19920282470