IONIC CONDUCTOR AND PRODUCTION OF IONIC CONDUCTOR THIN FILM
PURPOSE:To form an ionic conductor thin film having a thickness of mum order or less and composed of an ionic conductive ceramic having excellent characteristics by controlling the compositional ratio even in a multi-component system. CONSTITUTION:A zirconium (Zr) target and a yttrium (Y) target are...
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| Main Authors | , , |
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| Format | Patent |
| Language | English |
| Published |
20.04.1993
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| Subjects | |
| Online Access | Get full text |
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| Abstract | PURPOSE:To form an ionic conductor thin film having a thickness of mum order or less and composed of an ionic conductive ceramic having excellent characteristics by controlling the compositional ratio even in a multi-component system. CONSTITUTION:A zirconium (Zr) target and a yttrium (Y) target are prepared beforehand. Zr and Y are alternately sputtered by alternately using the Zr and Y as the target and the obtained laminated thin films 2,3 are baked and oxidized to obtain the objective ionic conductive oxide ceramic 4. |
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| AbstractList | PURPOSE:To form an ionic conductor thin film having a thickness of mum order or less and composed of an ionic conductive ceramic having excellent characteristics by controlling the compositional ratio even in a multi-component system. CONSTITUTION:A zirconium (Zr) target and a yttrium (Y) target are prepared beforehand. Zr and Y are alternately sputtered by alternately using the Zr and Y as the target and the obtained laminated thin films 2,3 are baked and oxidized to obtain the objective ionic conductive oxide ceramic 4. |
| Author | KAJIMA TAKAFUMI NAKAMURA KATSUAKI ISHIBASHI ATSUNARI |
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| Notes | Application Number: JP19910287061 |
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| PublicationCentury | 1900 |
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| PublicationDecade | 1990 |
| PublicationYear | 1993 |
| RelatedCompanies | FUJIKURA LTD CHIKIYUU KANKYO SANGYO GIJUTSU KENKYU KIKO |
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| Snippet | PURPOSE:To form an ionic conductor thin film having a thickness of mum order or less and composed of an ionic conductive ceramic having excellent... |
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| SubjectTerms | ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CABLES CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE CONDUCTORS ELECTRICITY INSULATORS INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES LIME, MAGNESIA MEASURING METALLURGY PHYSICS REFRACTORIES SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES SLAG TESTING TREATMENT OF NATURAL STONE |
| Title | IONIC CONDUCTOR AND PRODUCTION OF IONIC CONDUCTOR THIN FILM |
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