IONIC CONDUCTOR AND PRODUCTION OF IONIC CONDUCTOR THIN FILM

PURPOSE:To form an ionic conductor thin film having a thickness of mum order or less and composed of an ionic conductive ceramic having excellent characteristics by controlling the compositional ratio even in a multi-component system. CONSTITUTION:A zirconium (Zr) target and a yttrium (Y) target are...

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Bibliographic Details
Main Authors ISHIBASHI ATSUNARI, KAJIMA TAKAFUMI, NAKAMURA KATSUAKI
Format Patent
LanguageEnglish
Published 20.04.1993
Subjects
ARTIFICIAL STONE
BASIC ELECTRIC ELEMENTS
CABLES
CEMENTS
CERAMICS
CHEMISTRY
COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS
CONCRETE
CONDUCTORS
ELECTRICITY
INSULATORS
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
LIME, MAGNESIA
MEASURING
METALLURGY
PHYSICS
REFRACTORIES
SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES
SLAG
TESTING
TREATMENT OF NATURAL STONE
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Summary:PURPOSE:To form an ionic conductor thin film having a thickness of mum order or less and composed of an ionic conductive ceramic having excellent characteristics by controlling the compositional ratio even in a multi-component system. CONSTITUTION:A zirconium (Zr) target and a yttrium (Y) target are prepared beforehand. Zr and Y are alternately sputtered by alternately using the Zr and Y as the target and the obtained laminated thin films 2,3 are baked and oxidized to obtain the objective ionic conductive oxide ceramic 4.
Bibliography:Application Number: JP19910287061