JPH05299798
PURPOSE:To obtain an electronic circuit board which is free from cracks or the like and excellent in a circuit quality by using a metal composite material as the board. CONSTITUTION:An SiC whisker/Al board listed in Table 2 is used as a metal composite material (MMC). SiO2, which serves as an insula...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
12.11.1993
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Edition | 5 |
Subjects | |
Online Access | Get full text |
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Summary: | PURPOSE:To obtain an electronic circuit board which is free from cracks or the like and excellent in a circuit quality by using a metal composite material as the board. CONSTITUTION:An SiC whisker/Al board listed in Table 2 is used as a metal composite material (MMC). SiO2, which serves as an insulation material is formed thereon by means of vacuum deposition where the Al in the matrix is a JIS7075-specified Al+2% Zn composition. Then, Cu, which is a first conductor layer, is formed on the insulation layer by vacuum deposition and a via hole is formed by etching; the conductor later Cu is further formed thereon by vacuum deposition and etched, thereby forming a circuit. The circuit comprising four conductor layers is formed by repeating this work. This construction makes it possible to reduce the difference of a coefficient of linear expansion with the insulation layer and inhibit a drop in insulation resistance and provide high heat emission properties and reduce thermal damages of components to be etched, such as IC. |
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Bibliography: | Application Number: JP19910061592 |