MICROSCOPE OBSERVATION DEVICE

PURPOSE:To offer the microscope observation device capable of forming a two-dimensional image, which has high resolution in optical two dimensions and also has high size reproducibility, in real time. CONSTITUTION:The laser beam from a laser light source 1 after being deflected at a fast speed in a...

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Bibliographic Details
Main Authors OIDE TAKAHIRO, YAMAUCHI YOSHIHIKO, UCHIYAMA YASUSHI, AWAMURA DAIKICHI
Format Patent
LanguageEnglish
Published 05.02.1993
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:PURPOSE:To offer the microscope observation device capable of forming a two-dimensional image, which has high resolution in optical two dimensions and also has high size reproducibility, in real time. CONSTITUTION:The laser beam from a laser light source 1 after being deflected at a fast speed in a main scanning direction by an optoacoustic deflecting element 3 is deflected at a slow speed in a subscanning direction by a 1st vibration mirror 8 to radiate a sample 13 and the reflected light from the sample 13 after radiating the 1st vibration mirror 8 again to cancel the deflection in the subscanning direction radiates a slit 19 extending in the main scanning direction; and the light transmitted through this slit 19 radiates a 2nd vibration mirror 22 and is deflected again in the subscanning direction and made incident on a CCD two-dimensional image pickup element 24. The laser light source 1, an observation point on the sample 13, the slit 19, and the CCD two-dimensional image pickup element 24 are so arranged as to constitute a confocal optical system in conjugate image formation relation.
Bibliography:Application Number: JP19910201174