DEVICE FOR FORMING THIN FILM

PURPOSE:To enable easy and complete removal of a fouling substance from a vacuum vessel to thereby improve production efficiency by using a replaceable cartridge which can be encased in the vessel and forming a thin film on the surface of a part within the cartridge. CONSTITUTION:The title device co...

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Bibliographic Details
Main Author SANO KEIICHIRO
Format Patent
LanguageEnglish
Published 31.08.1993
Subjects
CHEMISTRY
COMPOSITIONS BASED THEREON
MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS
MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
METALLURGY
ORGANIC MACROMOLECULAR COMPOUNDS
THEIR PREPARATION OR CHEMICAL WORKING-UP
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Summary:PURPOSE:To enable easy and complete removal of a fouling substance from a vacuum vessel to thereby improve production efficiency by using a replaceable cartridge which can be encased in the vessel and forming a thin film on the surface of a part within the cartridge. CONSTITUTION:The title device comprises a vacuum reactor 1 and a replaceable cartridge 15 which can be encased in the reactor 1. A thin film is deposited on the surface of a part 3 in this cartridge 15.
Bibliography:Application Number: JP19910057882