CATHODE FOR PRODUCING PLASMA

PURPOSE:To provide a plasma producing cathode, which can start electric discharge certainly and stably, reduce the power consumption and the amount of LaB6 filament exhaustion, and suppress the running cost. CONSTITUTION:A plasma producing cathode 11 is equipped with an outer cylinder 13 made from a...

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Bibliographic Details
Main Authors HAMAGAKI MANABU, HARA TAMIO
Format Patent
LanguageEnglish
Published 13.07.1993
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:PURPOSE:To provide a plasma producing cathode, which can start electric discharge certainly and stably, reduce the power consumption and the amount of LaB6 filament exhaustion, and suppress the running cost. CONSTITUTION:A plasma producing cathode 11 is equipped with an outer cylinder 13 made from a pipe of Ta in such a way as enclosing the outside, and inside of this outer cylinder, a LaB6 filament 14 formed in a coil is provided as an aux. cathode. A disk-shaped main cathode 16 made from LaB6 and having a circular through hole 15 in the central part is installed at that end of the outer cylinder 13 on the side nearer the anode 12.
Bibliography:Application Number: JP19910342997