KFORMATION OF THIN FILM OF COMPOUND OXIDE

PURPOSE:To use a metal required to constitute a thin film even in a shape of a metal hydroxide or a hydrate-containing salt, to stabilize a coating solution and to form a various kinds of compound oxide thin films by simple operation by firstly suppressing hydrolysis of an alkoxide compound with a c...

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Bibliographic Details
Main Authors YAMANAKA SEIJI, YONEZAWA MASA
Format Patent
LanguageEnglish
Published 26.01.1993
Subjects
CHEMISTRY
COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F
INORGANIC CHEMISTRY
METALLURGY
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Summary:PURPOSE:To use a metal required to constitute a thin film even in a shape of a metal hydroxide or a hydrate-containing salt, to stabilize a coating solution and to form a various kinds of compound oxide thin films by simple operation by firstly suppressing hydrolysis of an alkoxide compound with a carboxylic acid. CONSTITUTION:Either or both of Zr alkoxide and a Ti alkoxide are dissolved in carboxylic acid. A compound selected from a group consisting of acetates, nitrates, hydroxides of metal elements except Zr and Ti and metal salt hydrates thereof is dissolved in the carboxylic acid or an alcohol and water is added to the mixed solution of the carboxylic acid solutions. The alcohol solution is mixed with a carboxylic acid solution to give a coating solution. The coating solution is applied to the surface of a substrate to form a coating film, the substrate is dried and heat-treated to form a compound oxide precursor, which is burnt to give a compound oxide thin film.
Bibliography:Application Number: JP19910188028