PRODUCTION OF BARIUM TITANATE THIN FILM
PURPOSE:To inexpensively produce a homogeneous high-purity thin film having 1mum thickness on a base plate by using a highly stable coating soln. from which the solvent is easily removed. CONSTITUTION:A titanium alkoxide soln. adjusted by using an alcohol or a carboxylic acid as the solvent and the...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
15.12.1992
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Subjects | |
Online Access | Get full text |
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Summary: | PURPOSE:To inexpensively produce a homogeneous high-purity thin film having 1mum thickness on a base plate by using a highly stable coating soln. from which the solvent is easily removed. CONSTITUTION:A titanium alkoxide soln. adjusted by using an alcohol or a carboxylic acid as the solvent and the soln. of a barium salt such as barium acetate in a carboxylic acid such as acetic acid or the barium salt itself are mixed so that the molar ratio of Ba to Ti is controlled to 1:1. The mixture is uniformly mixed with a hydrolysis inhibitor such as alcoholamines, glycols and beta-diketones to prepare a coating soln. The soln. is applied on the surface of a heat-resistant base plate to form a coating film, the coated base plate is dried and heat-treated to form a precursor for barium titanate, and the precursor is baked at 700-1000 deg.C to obtain a barium titanate thin film. |
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Bibliography: | Application Number: JP19910159659 |