QUANTITATIVELY WAFER CONTAMINATING JIG

• Main Author: MUKAI TOSHIO
• Format: Patent
• Language: English
• Published: 16.11.1992
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PURPOSE:To provide the titled jig with which even beginners can easily contaminate a wafer and various solutions can be dealt with using a few wafers, little affected by atmosphere in a dry condition. CONSTITUTION:The stage 10 to hold a wafer at a predefined position and a box 20 which houses the st...