QUANTITATIVELY WAFER CONTAMINATING JIG

PURPOSE:To provide the titled jig with which even beginners can easily contaminate a wafer and various solutions can be dealt with using a few wafers, little affected by atmosphere in a dry condition. CONSTITUTION:The stage 10 to hold a wafer at a predefined position and a box 20 which houses the st...

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Bibliographic Details
Main Author MUKAI TOSHIO
Format Patent
LanguageEnglish
Published 16.11.1992
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE:To provide the titled jig with which even beginners can easily contaminate a wafer and various solutions can be dealt with using a few wafers, little affected by atmosphere in a dry condition. CONSTITUTION:The stage 10 to hold a wafer at a predefined position and a box 20 which houses the stage 10 are provided, and the cap structure 21 of the above stated box 20 has an opening 211 where the tip 31 of pipet 30 for dripping contaminated solution is inserted.
Bibliography:Application Number: JP19910125127