FILM FORMING DEVICE

• Main Authors: MIYAJIMA TOSHIHIKO, ISHIZAKI HIDEKI
• Format: Patent
• Language: English
• Published: 04.11.1992
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; INDUCTANCES; INFORMATION STORAGE; INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MAGNETS; METALLURGY; PHYSICS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSFORMERS

PURPOSE:To drastically reduce dusting, to prevent the infiltration of foreign matter into a film and to improve the film quality at the time of forming the film while rotating and revolving a discoid body to be deposited with in a chamber with a rotation transmission member by making the member from a resin. CONSTITUTION:The rotating shaft 45 of a discoid tray 4 is rotatably and vertically supported in a chamber 4, and plural discoid holders 5 are rotatably placed at regular intervals on the specified circumferential path on the tray 4. A body 7 to be deposited with is fixed on each holder 5, the gears 61 and 65 of the specified gear ratio are respectively provided to the rotating shaft 45 and the rotating shaft 55 of the holder 5. When both gears are meshed and driven, the tray 4 is rotated, and the holder 5 is revolved and rotated in accordance with the gear ratio. In this film forming device, one or both of the gears 61 and 65 are made of a resin (polyamide, etc.), and the compressive elastic modulus is controlled to about 1-10kgf/mm and the Shore D hardness to about 40-100.