SILICON VIBRATION TYPE SENSOR

• Main Author: FUKUHARA SATOSHI
• Format: Patent
• Language: English
• Published: 22.10.1992
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

PURPOSE:To ahieve a lowering of an extraneous electric noise by providing a photointerferometer comprising a light waveguide on a silicon substrate as vibration detecting means to improve crosstalk of an input signal. CONSTITUTION:When a voltage is applied to a vibrator 21 in a magnetic field, the v...