SILICON VIBRATION TYPE SENSOR

• Main Author: FUKUHARA SATOSHI
• Format: Patent
• Language: English
• Published: 22.10.1992
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

PURPOSE:To ahieve a lowering of an extraneous electric noise by providing a photointerferometer comprising a light waveguide on a silicon substrate as vibration detecting means to improve crosstalk of an input signal. CONSTITUTION:When a voltage is applied to a vibrator 21 in a magnetic field, the vibrator 21 deflects and a distortion is caused at a root part of the vibrator 21. With a light waveguide 26, the distortion is detected to be outputted as interference signals of light of the light waveguides 26 and 27 while being fed back to a vibrator drive circuit. When output lights of the light waveguides 26 and 27 are coupled by a Y type branch coupler 25b, light whose phase is shifted in correspondence with the change of an optical path length of the light waveguides 26 and 27 causes an interferance. As a result, an output signal of a photoelectric converter 29 causes a change in the signal. An output signal of the converter 29 in outputted through an amplifier 30 while being fed back to the vibrator drive circuit to form a self-excitation circuit. With such an arrangement, a stable self-excitation circuit can be formed thereby eliminating effects of electric noises.