CARRYING DEVICE

• Main Authors: ENOMOTO YOSHIHIRO, ODA YOSHIMASA
• Format: Patent
• Language: English
• Published: 12.10.1992
• Subjects: BASIC ELECTRIC ELEMENTS; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; CONVEYING; DYNAMO-ELECTRIC MACHINES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERATION; HANDLING THIN OR FILAMENTARY MATERIAL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

PURPOSE:To miniaturize a carrying device by utilizing a noncontact driving motor such as a linear pulse motor or the like to reciprocatively move a floating body. CONSTITUTION:A floating body 21 staying in a vacuum chamber 2 is directly reciprocated by a linear pulse motor, which is composed of a motor body 27 and a toothed part 28, and the motor body 27 is arranged between a pair of magnetic bearing parts 22. The toothed part 28 is provided along a longitudinal direction on the periphery of the floating body 21. The motor body 27 thereby reciprocatively moves only the floating body 21. In addition to that, a pair of the magnetic bearing parts 22 have plural electromagnets 23, 24 and sensor parts 25, 26, and the electromagnets 23, 24 are severally excited on the basis of the floating position of the floating body 21 detected by the sensor parts 25, 26 to support the floating body 21 through their magnetic force.