GLOW-DISCHARGE MASS SPECTROMETRY

PURPOSE:To perform quick and highly accurate analysis when the analysis of a minute amount of an element on the surface of a solid sample is performed by using a glow-discharge mass spectrometric analysis method by quickly removing the contaminated part on the surface of the sample, preventing reatt...

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Bibliographic Details
Main Authors ONO AKIHIRO, UEKI KAZUHIRO, TANAKA YUKIMOTO
Format Patent
LanguageEnglish
Published 17.09.1992
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:PURPOSE:To perform quick and highly accurate analysis when the analysis of a minute amount of an element on the surface of a solid sample is performed by using a glow-discharge mass spectrometric analysis method by quickly removing the contaminated part on the surface of the sample, preventing reattachment, and introducing the sample into the main body of the analyzing apparatus. CONSTITUTION:A sample cleaning device 1 which is attached to a glow- discharge mass spectrometric analytic device 15 is used. High-purity inactive gas is blown, and spark discharging is performed. Thus, the surface of a sample 3 is cleaned. The peeled contaminated material is discharged to the outside of the system with a discharging pump. The sample 3 is directly introduced into a chamber 16 of the neighboring glow-discharge mass spectrometric analysis device 15 so that the sample 3 is not contaminated by the exposure to the external air.
Bibliography:Application Number: JP19910040596