LASER INSPECTING DEVICE

PURPOSE:To provide a device to facilitate manufacture of a sensor head 5 formed by bundling optical fibers for receiving scanning beams and combining with photoelectric conversion element, in a device to inspect a sheetform object for a defect through scanning of laser beams. CONSTITUTION:A laser in...

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Bibliographic Details
Main Authors TODA MASATOSHI, SAITO NORIAKI
Format Patent
LanguageEnglish
Published 05.08.1992
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
TESTING
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Summary:PURPOSE:To provide a device to facilitate manufacture of a sensor head 5 formed by bundling optical fibers for receiving scanning beams and combining with photoelectric conversion element, in a device to inspect a sheetform object for a defect through scanning of laser beams. CONSTITUTION:A laser inspecting device comprises a laser scanning means 1, a sensor head 5 wherein optical fibers are two-dimensionally arranged, a photoelectric conversion means 6, and a processing circuit. The photoelectric conversion means 6 has a plurality of photoelectric conversion elements, and the optical fibers are divided into pairs corresponding to those of the photoelectric elements. With the increase of a distance by which the optical fiber is parted away from a light receiving center, array density of the optical fibers is coarsened or the size of the optical fiber is increased. This constitution reduces the number of the optical fibers without reducing detecting performance.
Bibliography:Application Number: JP19900415774