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Abstract PURPOSE:To reduce defects and to obtain a high-quality optical disk substrate by forming the rugged information pattern of a formed medium for transfer by etching. CONSTITUTION:A photoresist 3 is formed on a mirror-finished stamper with no information pattern, an information pattern 6 is formed in the photoresist 3 and etching is carried out to obtain a formed medium for transfer. Since the information pattern 6 is formed in the surface of the stamper by etching with the photoresist 3 as a mask, stress is not produced in the stamper and a high-quality patterned stamper free from a deposit causing defects is stably obtd. A high-quality optical disk substrate with a formed satisfactory information pattern can be obtd.
AbstractList PURPOSE:To reduce defects and to obtain a high-quality optical disk substrate by forming the rugged information pattern of a formed medium for transfer by etching. CONSTITUTION:A photoresist 3 is formed on a mirror-finished stamper with no information pattern, an information pattern 6 is formed in the photoresist 3 and etching is carried out to obtain a formed medium for transfer. Since the information pattern 6 is formed in the surface of the stamper by etching with the photoresist 3 as a mask, stress is not produced in the stamper and a high-quality patterned stamper free from a deposit causing defects is stably obtd. A high-quality optical disk substrate with a formed satisfactory information pattern can be obtd.
Author HORIGOME SHINKICHI
ITO SHO
KATO KEIZO
SUZUKI MAKOTO
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Snippet PURPOSE:To reduce defects and to obtain a high-quality optical disk substrate by forming the rugged information pattern of a formed medium for transfer by...
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SubjectTerms GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS
INFORMATION STORAGE
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER
PERFORMING OPERATIONS
PHYSICS
PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCESIN A PLASTIC STATE
TECHNICAL SUBJECTS COVERED BY FORMER USPC
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS
TRANSPORTING
WORKING OF PLASTICS
WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Title FORMED MEDIUM FOR TRANSFER AND PRODUCTION THEREOF
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