FORMED MEDIUM FOR TRANSFER AND PRODUCTION THEREOF
PURPOSE:To reduce defects and to obtain a high-quality optical disk substrate by forming the rugged information pattern of a formed medium for transfer by etching. CONSTITUTION:A photoresist 3 is formed on a mirror-finished stamper with no information pattern, an information pattern 6 is formed in t...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
28.07.1992
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Subjects | |
Online Access | Get full text |
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Summary: | PURPOSE:To reduce defects and to obtain a high-quality optical disk substrate by forming the rugged information pattern of a formed medium for transfer by etching. CONSTITUTION:A photoresist 3 is formed on a mirror-finished stamper with no information pattern, an information pattern 6 is formed in the photoresist 3 and etching is carried out to obtain a formed medium for transfer. Since the information pattern 6 is formed in the surface of the stamper by etching with the photoresist 3 as a mask, stress is not produced in the stamper and a high-quality patterned stamper free from a deposit causing defects is stably obtd. A high-quality optical disk substrate with a formed satisfactory information pattern can be obtd. |
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Bibliography: | Application Number: JP19900337075 |