CHARGED-PARTICLE BEAM TREATMENT METHOD AND DEVICE THEREOF

• Main Authors: HARAICHI SATOSHI, SHIMASE AKIRA, AZUMA JUNZO, TAKAHASHI TAKAHIKO, ITO FUMIKAZU, MORI JUNICHI
• Format: Patent
• Language: English
• Published: 03.07.1992
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PURPOSE:To make it possible to perform a highly reliable processing even on a complicated element and to make it possible to conduct all the processes of the processing in a short time by a method wherein a charged-particle beam treatment method is performed so as to have a process for treating the...