MEASURING APPARATUS FOR DIELECTRIC WITHSTAND VOLTAGE

PURPOSE:To accurately determine dielectric withstand voltage by fixing the dielectric withstand voltage by confirming that an increase in the change rate of a current value lowers to a predetermined value or less. CONSTITUTION:A voltage changing means 15 changes the voltage applied to a sample 14 by...

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Bibliographic Details
Main Author FUSEGAWA KAZUHIRO
Format Patent
LanguageEnglish
Published 29.06.1992
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Summary:PURPOSE:To accurately determine dielectric withstand voltage by fixing the dielectric withstand voltage by confirming that an increase in the change rate of a current value lowers to a predetermined value or less. CONSTITUTION:A voltage changing means 15 changes the voltage applied to a sample 14 by a definite value at a definite time interval and a current measuring means 16 measures the current flowing across conductor films through an insulating film each time when the voltage changes. Next, a change rate calculating means 17 calculates the change rate of the measured current value. When the increase of the change rate exceeds a predetermined value, a dielectric withstand voltage estimating means 18 calculates an electric field value from the value of the voltage applied to the sample 14 to estimate dielectric withstand voltage continuously, the voltage changing means 15 changes applied voltage and the current measuring means 16 measures the value of the current flowing through the sample 14 and the change rate calculating means 17 calculates the change rate of the current value. When it is confirmed that the increase of the change rate of the current value is again lowered to the predetermined value or less after dielectric withstand voltage is estimated, the estimated dielectric withstand voltage is fixed by a dielectric withstand voltage fixing means.
Bibliography:Application Number: JP19900309959