AXIAL FLOW MOLECULAR PUMP

• Main Author: YAMAMOTO KUNICHI
• Format: Patent
• Language: English
• Published: 16.04.1992
• Subjects: BLASTING; HEATING; LIGHTING; MECHANICAL ENGINEERING; NON-POSITIVE DISPLACEMENT PUMPS; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; WEAPONS

PURPOSE:To maintain the high-vacuum state for a long period by feeding a freezing mixture to a cooling pipe to cool stationary blades, rotating rotary blades at a high speed to discharge the gas on the intake port side to the discharge port side, and condensing and exhausting at least the liquid component contained in the gas on the stationary blades. CONSTITUTION:A cooling pipe 33 penetrates peripheral sections of stationary blades 32 supported apart from a pump case 31, and a freezing mixture such as liquid He or liquid N2 fed from a bottle 36 connected to the cooling pipe 33 is fed into the cooling pipe 33 to cool the stationary blades 32. Rotary blades 21 are rotated at a high speed in an axial flow molecular pump, the freezing mixture is fed to the cooling pipe 33 to cool the stationary blades 33 to the extremely low temperature, thus the gas in a vacuum device is discharged to an exhaust port 35 from an intake port 34, and the liquid component such as steam and oil in the gas is condensed and discharged on the stationary blades 32. The axial flow molecular pump quickly discharges the gas containing the liquid component to the outside of a vacuum device and can generate the same clean vacuum as that generated by a cryopump.