METHOD FOR HARDENING PLASTIC SURFACE

• Main Authors: NISHI AKIO, USAMI MASAHIRO, UCHIDA SATOSHI, SASAGAWA EISHIRO, MURATA MASAYOSHI
• Format: Patent
• Language: English
• Published: 08.04.1992
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PURPOSE:To form a thin amorphous ceramic film having superior joining property and high strength by chemically vapor-depositing thin amorphous ceramic film onto a plastic surface into multilayered state. CONSTITUTION:A primary thin ceramic film is vapor-deposited onto a plastic surface by using monosilicon compound as gaseous raw material. Then, a secondary thin ceramic film is vapor-deposited onto the resulting vapor deposited film by using organosiloxane as gaseous raw material. Because the vapor deposited film having superior joining property is formed on the plastic surface and the vapor deposited film having high strength is further formed on the above film, plastic glass having peeling resistance and excellent in scratch resistance can be obtained. Moreover, when oxygen is mixed with the gaseous raw materials used for the vapor deposition of the primary and the secondary thin ceramic film, the atomic composition of the hard film becomes close to that of SiO2 in particular, and hardness can be particularly increased. By this method, the thin amorphous ceramic film having superior joining property and high hardness can be formed on the plastic substrate, and the scratch resistance of the resulting plastic glass can be improved.