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PURPOSE:To detect the relative moving state of both parts accurately by constituting each element so that fluctuation is offset even if the distance between a main scale and a secondary scale is fluctuated. CONSTITUTION:In a detecting head 12, a main scale 9 can be moved in the direction of an arrow...

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Bibliographic Details
Main Author USUI MASAYUKI
Format Patent
LanguageEnglish
Published 24.04.1991
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Summary:PURPOSE:To detect the relative moving state of both parts accurately by constituting each element so that fluctuation is offset even if the distance between a main scale and a secondary scale is fluctuated. CONSTITUTION:In a detecting head 12, a main scale 9 can be moved in the direction of an arrow A with respect to the head 12. Part of the luminous flux from a first light projecting means 101 which has passed through a scale 9 and a first auxiliary scale 10 is detected with photodetectors 5 and 6. Similarly, part of the luminous flux from a second light projecting means 102 which has passed through the scale 9 and a second auxiliary scale 11 is detected with photodetectors 7 and 8. By this constitution, when the distance between the scale 9 and the scale 10 or the distance between the scale 9 and the scale 11 is fluctuated, the increase or decrease of the distance in the moving direction is reversed to each other with respect to the scale 10 and the scale 11. Therefore, the change in output amplitudes of the signals obtained from the light receiving means 103 and 104 are reverse to each other.
Bibliography:Application Number: JP19890236365