COPPER ALLOY FOR BACKING PLATE
PURPOSE:To obtain the copper alloy suitable for a backing plate for fixing a target used for sputtering by incorporating Cu with specified amounts of Fe and P or other specified metallic elements as well. CONSTITUTION:As a backing plate material fixing a target used for forming a high function thin...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
27.03.1991
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Subjects | |
Online Access | Get full text |
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