UNIVERSAL CHUCK TABLE

PURPOSE:To prevent the shapes of partition portions from being copied on the surfaces of processed matters, by making a constitution so that a suction sphere may be divided and partitioned by means of ringlike partition potions in opposition to processed matters whose sizes are different, and exposu...

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Bibliographic Details
Main Authors DEJIMA NOBUKAZU, OBATA SO, NANJO MASATOSHI
Format Patent
LanguageEnglish
Published 13.02.1991
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Summary:PURPOSE:To prevent the shapes of partition portions from being copied on the surfaces of processed matters, by making a constitution so that a suction sphere may be divided and partitioned by means of ringlike partition potions in opposition to processed matters whose sizes are different, and exposure may not occur on the mounting surfaces of processed matters. CONSTITUTION:A recessed cave-in portion 6 is provided at the center portion of the bottom portion 2b of the recessed portion 5 of a frame member 2, and ringlike groove portions 7-10 are formed in a concentric circle, and air suction holes 11-15 are respectively provided. A division member 3 as a whole is formed out of an inorganic matter having a ventilation quality, and ringlike partition portions 16-19 are formed out of powder of small mesh which is integrally sintered and has little ventilation. A surface member 4 is formed of a ventilation material, and provided in layers with the division member 3 within the recessed portion 5. Air suction means are provided connectingly at air suction holes 11-15 and connection with depressurizing means is made, and suction spheres are set in opposition to the sizes of processed matters by opening/closing selectively a valve.
Bibliography:Application Number: JP19890165835