VESSEL FOR ACCOMMODATING SUBSTRATE AND FORMING METHOD FOR VESSEL

• Main Author: UMEDA TOSHIYA
• Format: Patent
• Language: English
• Published: 26.07.1991
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PURPOSE:To prevent the accumulation of dust and eliminate the possibility of lossing an information segment, by forming, in a body, a vessel main body accommodating Si wafers and the like, and a cover member accommodating an information segment showing information like the lot number of wafers. CONSTITUTION:A vessel 1 for accommodating substrates is constituted of a vessel main body 1, an information segment 3 in which data for substrates are written, and a cover member 4 for protecting the segment 3, which are unified in a body. The cover member 4 is equipped with a recessed part 4A accommodating the information segment 3. A notch 4B and a notch 4C are formed on the front side and the rear side, respectively. Pins 4E of a right row and a left rows are planted in the inside bottom part 4D, which pins engage with the information segment 3. Penetrating holes 3A for engaging with the pins 4E of the member 4 are formed, and the information segment 3 is fixed on the member 4. In this constitution, the same resin material is used for the main body 1 and the cover member 4, which are molded by using a metal mold.