MASS FLOW CONTROLLER

• Main Authors: SHIMOMURA MITSUZO, YAMAGUCHI MASAO
• Format: Patent
• Language: English
• Published: 04.07.1991
• Subjects: CONTROLLING; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; PHYSICS; REGULATING; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

PURPOSE:To always recognize the state of each part in an MFC from the external by providing a valve displacement extent detecting part having a sensor, a pressure detecting part, and a temperature detecting part. CONSTITUTION:A valve displacement extent detecting part 12 detects the degree of opening of a control valve 3 to output an opening degree signal V0, and a pressure detecting part 13 detects one of pressures P1 to P3 in respective parts in the MFC by sensors 131 to 133 to output a pressure signal Pn, and a temperature detecting part 14 detects one of temperatures T1 to T3 in respective parts in the MFC by sensors 141 to 143 to output a temperature signal Tn. As the result, the state of each part in the MFC is always recognized from the external. Thus, a sensitivity constant, a full scale coefficient, and calibration curve data are set again from the external to set the MFC to the state corresponding to the classification and the flow rate of liquid as the control object.